Technology Lab
PR Spectroscopy
Methods FMF, Fiederle
| Technology Lab | Model: | -- |
| Unit and Room: | FMF, Physics Hall | |
| Responsible: | ||
| Clean Room Facility |
Further information: | |
| Short Description: Full equipped clean room facility for processing |
Picture of the Equipment
|
|
| Available Experiments/Techniques: Mask aligner |
||
| Special Equipment: Processing of samples and devices for deposition of metals and passivation |
||
| Measurements on the equipment are currently done by: | Students after extensive training Trained scientific service personal |
|
| Recent Publications, where this instrument was important (citation): |
||
| Typical problems that may be solved with this instrument: | - Processing of device structures - Development of metallization and passivation |
|
Technology Lab (this page as a pdf file)